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For lithium secondary microbattery anode, the tin oxide thin films with Si addition (0, 2, 6, 10, 20 ㏖%) were prepared with R.F. magnetron sputtering at substrate temperature of 300circC and Ar:O2=7:3 atmosphere. As Si addition amount increased, Si-O bonding density increased and Sn-O bonding density decreased. The addition of optimum Si amount led the decrease of Sn oxidation state so that the irreversible capacity reduced and cycle characteristic enhanced during charge-discharge test. SnO2films with 6 ㏖% Si had the highest reversible capacity of 700 mAh/g after 100 cycles.
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Key words: SnO2, R.F. magnetron sputtering, Lithium secondary battery
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