Abstract 

All-solid state lithium rechargeable thin film batteries were fabricated with the configuration of Cu0.5V2O5/Lipon/Li using sequential thin film techniques. Copper vanadium oxide thin films and Lipon thin films were prepared by DC reactive dual source magnetron sputtering and RF magnetron sputtering, respectively. Acoording to XRD analysis, we found our that copper vanadium oxide thin films were amorphous. The electrochemical behaviour of them was examined in half cell system using EC:DMC(1:1 in 1M LiPF6) liquid electrolyte. The ionic conductivity of Lipon thin film was 1.02X10-6 S/cm at 25ºC and Cu0.5V2O5/Lipon/Li cell showed that the discharge capacity was about 50 ㎂h/cm2-㎛ beyond 500 cycles.

Key words : Copper vanaduim oxide, Amorphous, Lipon, Thin film batteries